ERTUGRUL, Ishak. Displacement Analysis of the MEMS Device. Metallurgical and Materials Engineering, [S. l.], v. 27, n. 2, p. 171–176, 2020. DOI: 10.30544/504. Disponível em: https://metall-mater-eng.com/index.php/home/article/view/504. Acesso em: 27 aug. 2026.